Mass Flow Controllers



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Instruction manual

EL-FLOW Base series
Mass Flow Controllers


Doc. no L Date 28-08-2017
ATTENTION
Please read this instruction manual carefully before installing and operating the instrument.
Not following the guidelines could result in personal injury and/or damage to the equipment.


BRONKHORST® Page 2
EL-FLOW Base Series Mass Flow Controllers
9.17.061 Even though care has been taken in the preparation and publication of the contents of this manual, we do not assume legal or other liability for any inaccuracy, mistake, misstatement or any other error of whatsoever nature contained herein. The material in this manual is for information purposes only, and is subject to change without notice.


BRONKHORST®
9.17.061
EL-FLOW Base Series Mass Flow Controllers Page 3


Instructions:
Using micro-switch and leds on top of the instrument
Green led red led
Change bus-address/mac-id and baud rate
Step action indication
Read holding registers (03)
Write single register (06)
Diagnostics (08)
Report slave id (17)
View current control mode (press switch x briefly)
Measured value (measure)
Value mode instrument action
Serial number
Fluid name type
Control mode
Kp (pidkp) type
Knormal (contrresp)
Type access
Dynamic display factor



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